------Advanced devices and components for optical, semiconductor, medical and automobile applications must be developed continuously. Optics must have smoother surfaces year by year, and are to be employed for space observatory and solar light utilization. A new semiconductor devices such as monocrystalline SiC transistors must be developed for low CO2 electric products and Electric/Hybrid cars. Medical applications to improve QOL such as implants and surgical instruments are to be more and more developed with higher quality and higher functional surfaces such as biocompatibility. Automobile components which suffer from severe friction must have smoother surfaces but higher functional surfaces to keep lubricant. To cope with those advanced applications, we are developing ultra fabrication technologies; Ultra/nanoprecision grinding, hybrid finishing, ion-shot method, ultra large turning and diffractive machining. This talk introduces the-state-of-the-art on the above activities.